Clean Rooms - Nanofabrication
type: Facility
within: New Mountbatten
description: The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities housed in the new Mountbatten Complex at the University of Southampton. One of the premiere cleanrooms in Europe, the Centre has a uniquely broad range of technologies, combining traditional and novel top down fabrication with state-of-the-art bottom up fabrication. This allows us to develop and produce a wide range of devices in diverse fields such as electronics, nanotechnology and bionanotechnology and incorporate them into an equally comprehensive array of nano and microsystems for analysis and use. The characterisation capability is similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis. A detailed equiment list can be found at http://www.southampton-nanofab.com/machineDatabase/
notation: F10014
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: ANTENEY, IAIN
facility is RCUK costed: true

New Mountbatten
type: Building
type: UoSBuilding
within: http://id.southampton.ac.uk/site/1
notation: 53
formal organization: id.southampton.ac.uk
lat: 50.93739
long: -1.39862
disabled go page: https://www.accessable.co.uk/university-of-southampton/access-guides/building-53-mountbatten
occupant: Physical Sciences and Engineering
occupant: School of Electronics & Computer Science
occupant: EH
occupant: F7FP040000
occupant: F7EH020000
occupant: F7FP060000
occupant: F7EH010000
occupant: F7EH040000
occupant: F7FP070000
lacks feature: residential
building architect: architect
building date: 2008
building feature: Clean rooms
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Physical Sciences and Engineering
type: OrganizationalUnit
type: Organization
notation: F7

School of Electronics & Computer Science
type: Organization
notation: A3FP000000
notation: FP
has sub organization: A3FP090000
has sub organization: A3FP130000
has sub organization: A3FP030000
has sub organization: A3FP050000
has sub organization: A3FP020000
has sub organization: A3FP100000
has sub organization: A3FP080000
has sub organization: A3FP040000
has sub organization: A3FP160000
has sub organization: A3FP150000
has sub organization: A3FP060000
has sub organization: A3FP120000
has sub organization: A3FP110000

ANTENEY, IAIN
type: Agent

Imoxs Sem
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: X-ray fluorescence (XRF) analysis of glasses & high sensitivity trace analysis, spatial resolution 50um, sensitivity element dependant, down to 50ppm
notation: E10264
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Helios Sputtering System Type Xl 6"
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The HELIOS sputtering tool is a flexible platform for fast, precise and fully automated thin film coatings. It specializes in high quality optical coatings featuring very low absorption and scattering. Optical performance is ensured by the extremely dense, smooth, stoichiometric, and amorphous layers. Precision in layer growth control is facilitated by an optical monitoring system for in-situ on-substrate measurements.
notation: E10260
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Fluoresence System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Sub 100nm spatial resolution imagaing of distribution elements in a sample. Spatial location of lements in an alloy, imaging of contacts under metal, semiconductor metal failure analysis, analysis of layered structures.
notation: E10265
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

XY Stage / 1m Stage / Frame / Rack
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10407
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Plasma System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10436
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Optiwet St30
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Cleaner/lift-off/stripper module/developer module. 4,6,8 inch wafers, 5.6.7 inch plates.
notation: E10268
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Auto 306 Resistance Evaporation System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Resistance evaporation source for filament or boat evaporation. A built-in shield prevents unwanted coating of the vacuum chamber and adjacent deposition accessories. Four position turret evaporation source capable of sequentially depositing up to 4 different materials without breaking vacuum. Sources are selected and rotated into the evaporation position using a simple handwheel control. The sources can be configured to evaporate from the center or the side of the vacuum chamber for optimum film thickness uniformity onto a choice of static or rotating substrate fixtures.
notation: E10267
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Rapid Prototyping System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/59
description: Rapid prototyping machine, build resolution x-axis 600dpi/42um, y-axis 600dpi/42um, z-axis 1600dpi/16um, build size XxYxZ) 342 x 342 x 200mm, input formats STL, IPT, IAM, SLC and objDF files. Two resin setup VeroWhite (hard) and VeroBlack (soft), capable of producing parts of any hardness level by mixing both resins.
notation: E10270
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Impedance Analyser
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10435
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

He Ion Microscope: Orion-Bu
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The Zeiss Orion helium ion microscope has similar functionality to an electron microscope, but uses a focussed beam of helium ions in place of the electrons. The larger mass and therefore smaller de Broglie wavelength of helium ions compared to electrons means that the scanning helium ions microscope suffers less from diffraction effects than a scanning electron microscope (SEM). Since helium ions can be focused into a smaller probe size and provide a much smaller sample interaction compared to electrons, the Orion generates higher resolution images with better material contrast and 5 times improved depth of focus. The high resolution arises from the use of a finely sharpened needle and a process that strips individual atoms away from the source until an atomic pyramid is created with just three atoms at the very end of the source tip. The Orion achieves a resolution of less than 0.9nm at an energy of 25-30kV and can deliver beam currents between 1fA and 25pA.
notation: E10258
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Spectrograph
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10467
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

AQ317 Spectrum Analyser (purchased in 1999)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10408
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The Theta Probe X-ray Photoelectron Spectromer (XPS) allows the collection of angle-resolved spectra without the need to tilt the sample to nondestructively characterize ultra-thin layers.
notation: E10712
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

550 Degree Table
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10451
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Field Emmission Scanning Electron Microscope (FEG-SEM)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: High resolution FEG-SEM for sub 100nm imaging. Magnification x100 to x1000000
notation: E10261
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Evaporator Gun
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: LAB700 e-gun evaporator incorporates 2e-guns each with a 5xcrucible plate. is configured for reactive ion assisted deposition of dielectrics, high precision lift off, variable angle deposition, cryogenic deposition
notation: E10263
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Lightwave Polarization Analyser
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10404
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Nanonics Hydra SPM/SNOM System (Multiprobe System)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: The MultiView 4000 is a multi scanning probe system with an open platform for integration with a Raman spectrometer. The system is configured for dual probes set-up that allows multiple probe SNOM measurement and other SPM imaging. The system is also configured for optical waveguide device characterisation.
notation: E10237
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Transmission Microscope (DHM)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: Lyncée Tec¿s DHM T1000 series is composed of the only transmission configured optical profilers on the market. Based on Digital Holographic Microscopy technology, its contactless full-field 3D optical topography performed at video rate makes it an ideal tool for quantitative dynamic and static measurements.
notation: E10393
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Nikon Microscope system
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10398
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Coherent RegA 9000 Controller
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: Control box for Coherent RegA, used for optimising cavity injection and ejection timings
notation: E10419
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Nikon L200D microscope
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Upright 8" yellow room microscope, 5M camera, 5x to 150x objectives, Nomarski
notation: E10272
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Coolpower 4.2Gm Two Stge Systems (Obsolete/Decommissioned YE 15/16 - per YY 04/08/2016)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/17
description: BAK600 e-gun/thermal evaporator is configured for non-reactive deposition of metal contact stacks , metal masking layers, some dielectrics, ITO.
notation: E10255
formal organization: id.southampton.ac.uk
organization part: BX
organization part: F2
primary contact: primary contact

Radio Frequency Test Kit
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10434
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Plasmalab 80 Plus Rie Etcher
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The etching plasma is created by an RIE RF source and RF induction magnetic coil to produce high plasma densities. The results are high etch rate, high aspect ratio, and anisotropic etching of material of the samples. The system can also operate in ICP or RIE mode separately. This system is configured for fluorine-based chemistry etching. Ideal for deep oxide etching, silicon nitride, polymer, poly-silicon, amorphous silicon and crystalline silicon.
notation: E10241
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Opt System 100 Metal Etcher
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP06 RIE80+ system is configured for multimaterial etching like silica, silicon nitride, polymer, III-V based, semiconductor-metal, polysilicon and amorphous silicon.
notation: E10240
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

EVG620 Top Side Mask Aligner
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The EVG 620 provides high precision manual alignment on wafers. This is the main maks aligner of the cleanroom and can handle wafer sizes up to 150mm. Exposure can be performed in hard, soft and proximity modes.
notation: E10244
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Tempress Clean Furnace Stack
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: 150mm wafers, automated loading, dru oxidation 600-1150C, wet oxidation 600-1150C, anneal 600-1150C, temperature accuracy +/- 1C, 25 wafer boats.
notation: E10284
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Theta probe PARXPS system
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Parallel angle-resolved XPS (PARXPS) analysis without sample tilting, ability to collect angle-resolved XPS spectra over a 60 degree angular range, in parallel, without tilting the sample and allows the instrument to characterise ultra-thin films non-destructively, allows composition depth profiling using an integrated etching module, X-ray monochrmator with user-selectable spot size in the range 15um to 400um,. Ability to handle large or multiple samples, CCD sample alignment microscope perpendicular to the sample surface.
notation: E10276
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Alpha-At Analyzer
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/85
notation: E10425
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Gis System For Orion Microscope
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Gis System For Orion Microscope
notation: E10438
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Verdi 10 W solid state Laser System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: 10W solid state Coherent Verdi-10, continuous wave pump laser, used for pumping Mira 900
notation: E10418
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Ionfab 300 Plus
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Ionfab300Plus is a modular System designed for ion beam etching. It is used in a wide variety of processes, particularly in the Semiconductor and Optical Coating Industries.
notation: E10243
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Nvision 40 Fib
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The focussed ion beam (FIB) is a multi nanofabrication tool system capable of performing sophisticated nanomachining, in-situ metal or insulator deposition, lithography and metrology analysis. This versatile system is based on the dual ion and electron beams column concept, which allows it to perform ionic nanofabrication function while imaging using the scanning electron microscope. The liquid metal ion source (LMIS) for the system is gallium and it is integrated to an ionisation tungsten tip to produce a fine and high resolution ion beam. The additional features in the FIB are ion and electron beam induced deposition using gaseous metal-insulator sources.
notation: E10249
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

MM_Wave System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10396
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: GN
primary contact: primary contact

Caliber Spm System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The Caliber is a versatile and high performance SPM system designed for multifunctional and routine microscopy of surface topology, polymer, biomaterials and semiconductor materials. The compact design and user friendly interface make it a suitable educational tool as well as for research activity.
notation: E10235
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Atomic layer deposition system
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The FlexAl system allows the deposition of ultra-thin layers (typically a few nm) of a variety of metal oxides and nitrides from liquid precursors. The deposition process works by providing a short pulse of precursor, followed by purge and exhaust steps. This cycle is then repeated to build up a layer. Typical growth rates are around 1A/cycle. The system is currently configured for the deposition of ZnO and Al2O3. ZnO is deposited using a DEZ precursor. The deposition rate is typically 1A/cycle at 150C. The refractive index of ALD ZnO varies from 1.75 at low temperature to 1.83 at high temperaure, compared with 1.985 for bulk ZnO. Annealing at 425C (not optimised) can help improve electrical properties.
notation: E10251
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Nikon LV100D Bioelectronics microscope
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Upright 6" bioMEMS microscope, 5m camera, display & software, 5x to 150x objectives, Nomarski
notation: E10273
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Opt System 100 Oxide Etcher
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The etch mechanism of RIE is achieved by using the reactive gas plasma generated by strong RF source (13.56 MHz) to chemically ion etch the material of the samples. Depending on the process recipe, the material⿿s etched profile can achieve high anisotropy. The DP01 RIE80+ system is configured for etching of polysilicon, amorphous silicon, silica, silicon nitride and polymer. 13.56 MHz driven parallel plate reactor Substrate electrode: 170 or 240 mm Shower head gas inlet optimised for RIE High conductance vacuum layout Gases: CHF3, Ar, O2, SF6, CF4, N2
notation: E10239
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

DC Device Multi Probe Station
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Cascade Microtech prober, 4 x DCM 210 positioners, Agilent 4155C Semiconductor Parameter Analyser, Agilent 4279A 1MHz CV meter, Agilent E4443A sHz-6.7GHz spectrum analyser, Agilent MXG N5181A analog signal generator 250 KHz-1 GHz
notation: E10274
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Mass Spectrometer
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10508
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Opt System 100 Pecvd
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Plasma Enhanced Chemical Vapour Deposition (PECVD) system for the growth of amorphous and polycrystalline Si, SiGe and Ge layers. The layers can be doped during growth either n-type (using PH3) or p-type (using B2H6), thereby allowing p-n junctions to be formed. Amorphous silicon uses SiH4 for the source of silicon and CF4 & O2 for cleaning. The growth temperature is typically 250C, giving a growth rate of around 25 nm/min. Stress in the deposited layer is typically <200Mpa. Polycrystalline silicon uses SiH4 for the source of silicon and CF4 & O2 for cleaning. The growth temperature is typically >=610C. The growth rate at 610C is ~2 nm/min and at 650C ~ 20nm/min. Microcrystalline silicon uses SiH4 for the source of silicon and CF4 & O2 for cleaning. The growth temperature is typically in the range 585 - 610C, giving growth rates in the range 1 - 2 nm/min. Amorphous and polycrystalline germanium use GeH4 as a source of Ge and CF4 & O2 for cleaning.
notation: E10253
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Sapphire Laser Upgrade
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: NA
notation: E10510
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

EVG620 Double Side Mask Aligner
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The EVG620 is a dual-use tool designed for optical double-side lithography and precision alignment up to 150 mm wafer sizes. The fully-automated EVG620 utilizes a cassette-to-cassette handling system to efficiently process wafers from 50 mm to 150 mm in diameter, regardless of their shape or thickness. The system safely handles thick, bowed or small diameter wafers. The EVG620 superior alignment stage design achieves highly accurate alignment and exposure results while maintaining high throughput.
notation: E10245
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Evg620 Double Side Mask Aligner
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The EVG620 is a dual-use tool designed for optical double-side lithography and precision alignment up to 150 mm wafer sizes. The fully-automated EVG620 utilizes a cassette-to-cassette handling system to efficiently process wafers from 50 mm to 150 mm in diameter, regardless of their shape or thickness. The system safely handles thick, bowed or small diameter wafers. The EVG620 superior alignment stage design achieves highly accurate alignment and exposure results while maintaining high throughput.
notation: E10246
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Mira 900F V10 XW Opt 220 Control Box
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: Control box for Mira 900F, used for mode locking and monitoring of output power
notation: E10417
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Mbr System Laser
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10509
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Summit 12000B-Ap Probe Station Platform
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Semi-automatic 200mm probe station with micro-chamber, temperature control -65-200C. 4x67GHz infinity probes, eVue digital imaging system
notation: E10275
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Streak Camera System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10506
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

EVG501 Semi-Automated Lamination Machine
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10613
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

1000x Direct Diode Laser Serial No. 330739 (purchased in 2003)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10421
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Optical Component Characterization System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10344
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Microspectrometer System (QDI 302 UV)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: The QDI 302 Microscope Spectrophotometer is designed to add spectroscopy and imaging to your optical microscope. It can also be used to upgrade a legacy microspectrometer or to add spectroscopic and film thickness capabilities to a probe station. The QDI 302 attaches to the microscope, microspectrometer or probe station and enables you to collect transmission, reflectance, polarization or even fluorescence spectra of microscopic samples. Depending upon the microscope optics and sources, the spectral range is from the deep UV to the near infrared region. With the QDI 302, high quality spectra of even sub-micron samples can be acquired non-destructively and with ease.
notation: E10343
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Auto 306 Resistance Evaporation System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Desposition vaporator system. Evaporates commonly used metals (such as aluminum, chromium, silver, gold and many others).
notation: E10304
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: GN
primary contact: primary contact

Femtosecond Laser System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: Femtosecond optical charecterisation system, coherent laser, CCD camera & optics.
notation: E10294
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Vanadium Fibre Laser
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Wafer scribing tool, Vanadium Fibre Laser (1064nm wavelength, 0.25mJ pulse energy, 25um spot size), up to 5000 mm/s scanning speed, programmable z-axis, 245 lens upgrade allowing 220mm diameter field size, vision system for lase focusiing
notation: E10289
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Measurement system
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Particle measurement tool, 150mm substrates, sub micron particles down to 0.2um, measurement time 30 sec on 6" wafers, particles sensitivity 0.2um diameter latex spheres, haze sensitivity 0.4ppm, spatial resolution 50um spacing minimum, measurement range 0.004um and 102um in twelve ranges and 256 gradations.
notation: E10293
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Modified Material Testing Machine (M500-100CT)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The CT 500 range of twin column, computer controlled universal materials testing machine using Testometric's feature-rich winTest¿ software running under the Windows¿ operating system. Test setups are fully configurable and simple or more complex multi-stage test routines are controlled using the standard PC serial interface.
notation: E10330
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Optical Spectrum Analyser (AQ6370)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: The AQ6370 is Yokogawa`s high speed and high performance Optical Spectrum Analyzer for characterization of optical communications system and optical components. - High wavelength resolution: 0.02 nm - Wide close-in dynamic range - Single Mode and Multimode fiber test capability, via the same optical input:up to GI 62.5/125nm. - Pulsed light measurement capability
notation: E10309
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Optical Spectrum Analyser (Yokogawa AQ6315A)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: The AQ-6515A/-6315B optical spectrum analyzer brings advanced capabilities to a wide range of applications, from light source evaluation to measurement of loss wavelength characteristics in optical devices.
notation: E10310
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Platinum Liner & Buffer Plate
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10314
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Benchtop Furnace
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: 150mm wafers, manual loading, general furnace, temperature accuracy +/- 1C, 25 wafer boats.
notation: E10283
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Polytec MSA-400 Micro System Analyzer
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: 3D MEMS dynamics and topography tester. Scanning laser vibrometry for out of plane vibrations up to 20MHz, stroboscopic video microscopy for in-plane motion & vibrations, white light interferometry for surface topography http://data.southampton.ac.uk/equipment/E10277.html
notation: E10277
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Precision Scriber
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Scribing of Si, glass & brittle materials. Scribing of glass in all directions with auto alignment function, handles up 300mm substrates with a thickness up to 2mm.
notation: E10288
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Spin Coater
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10466
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Jetfirst 200 Rta / Jetfirst 200 Rta No Pump
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: 150mm wafers, temepratures from 400-1000/1200C (pyrometer), 400-1000C (thermocouple), times from 5s to 10mins, temperature accuracy +5c, temperature reproducibility
notation: E10282
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Long Scan Profilers
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Measures roughness, waviness, step height and wafer stress, 2D and 3D fully autiomated data scans, sequencing capable, up to 8" substrates, vertical features from 100A-300um with a vertical resolution down to 0.5A.
notation: E10291
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Woollam Md2000D Ellipsometer
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Spectral range 190nm-1999nm, 200mm computer controlled sample positioning, auto angle of incidence
notation: E10290
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Optical Spectrum Analyser (AQ6370)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10307
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Optical Spectrum Analyser (AQ6370)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The AQ6370 is Yokogawa`s high speed and high performance Optical Spectrum Analyzer for characterization of optical communications system and optical components. - High wavelength resolution: 0.02 nm - Wide close-in dynamic range - Single Mode and Multimode fiber test capability, via the same optical input:up to GI 62.5/125nm. - Pulsed light measurement capability
notation: E10308
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Cascade Microtech M150 Mulitpurpose Probing System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: 150mm manual probe station, 6 probes, Leica S6 stereo zoom microscope, 0.6-4xzoom, 30 x eyepieces
notation: E10279
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Quartz System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10448
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

5430 Fine Wire Bonder SN 30280
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Ultrasonic wedge bonder, AI and Au wires (25um), minimum bond pads 50x50um2, bare silicon bonding, programmable individual bonding parameters.
notation: E10287
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

AR ION Laser System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10369
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Grazing Incidence Vuv Spectrometer / Interface For Reading Images
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10511
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Femtotrain & Compressor
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10507
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Fibre Tapering & Bundling System (obsolete 1718)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Offers precision fusion splicing and fused fiber components critical to high-power fiber laser performance. This includes creating combiners and tapers, large mode area (LMA) fiber splicing, photonic crystal fiber (PCF) splicing, and large diameter fiber splicing with low loss.
notation: E10331
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Picosecond Laser System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: The Laser2000 range of picosecond lasers contains both high and low power lasers to cover a wide range of applications. The picosecond pulsed diode lasers and picosecond LED modules are particularly suitable for biomedical applications. High power picosecond lasers designed for industrial microprocessing offer a new level of precision and versatility.
notation: E10318
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Ex Demo V-570Pc Spectrophotometer System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: UV/VIS/Near IR spectrophotometer used for Absorption, Transmission and Reflectance measurments from 190 - 2500nm
notation: E10489
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Leo 1455VP Scanning Electron Microscope (SEM)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: A 30KV, LaB6(or tungsten filament) scanning electron microscope equipped with an Everhart-Thornley secondary electron detector and a cambridge four quadrant backscatter detector. Maximum resolution is 10nm depending on column conditions.
notation: E10512
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Red Optics And Lens Mounts – Part of the FRODOSpec for the Liverpool Telescope in the Canary Islands
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: NA
description: off campus
notation: E10496
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Analysers/Generator - 3 Items Each Over £25K
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10478
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Gatan X-ray Ultramicroscope (XuM) (accessory for the EVO SEM LS25 microscope)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The Gatan XuM utilises the electron beam in an scanning electron microscope to generate X-rays which are projected through a sample and onto an X-ray camera to form an image. This provides non-destructive imaging of the internal structure of suitable samples. The sample can be rotated and re-imaged multiple times to build up a tomographic dataset from which a 3D reconstruction of the sample can be generated. The resolution limit of this technique is ~400 nm.
notation: E10475
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Quantum Efficiency System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10446
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Ccd Camera
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10458
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Semiconductor Analyser
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10459
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Software Expansion Pack For E-Beam
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10449
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Orion Variable Accelerating Voltage Package
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10454
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Cryogenic Probe Station
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10465
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Beamlock 7W VIS/ UV Argon System Etc
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: Build into a confocal optical microscope
notation: E10500
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Clear View: O-Orion-Clearview
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10474
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Biolight 1000
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10488
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Gas Cabinet
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10456
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Coherent Enterprise II 653 Ar Ion Laser
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: Ar Ion laser (352nm and 364nm). 80mW laser power class 3B. Mounted to direct write lithography system. Local ID: PH/1895
notation: E10492
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Solar Simulator
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Solar simulators provide a broadband spectrum close to that of the sun from the UV to the IR. The main part of the solar simulator is a xenon arc lamp that reaches a color temperature of almost 6000K which is very close to sun light. We provide solar simulators with a wide range of luminous fields for different sample sizes and budgets, varying in size from 25 mm to 260 mm x 260 mm in diameter. The irradiance (W/m²) depends on the size of the desired output beam, the lamp¿s power input and the layout of the simulator¿s optic. The spectral characteristics are always the same.
notation: E10450
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Dry Bed Absorber System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10471
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Lasers - Verdi V5 / Mira 900F
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10502
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Monocl3
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10476
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

CCD Sensor (S/N 01412-01-01)–Part of the FRODOSpec for the Liverpool Telescope in the Canary Islands
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: NA
description: off campus
notation: E10495
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Tube Furnace Pumps
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10442
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Lasers - Verdi V10 / OPA 9400
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10501
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Bridgeport Model Vmc 800X Vertical Machining Centre
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10491
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Laser Lithography System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10464
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

2 Sawatec Hotplates
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10468
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Elemental Analysis: O-Orion-Rbs
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10473
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Recirculating Water Chiller for Beamlock 7W UV Argon System (E10500)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
description: Provides cooling water for Beamlock 7W Argon Laser E10500
notation: E10505
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Electronic Magnet (De Groot)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10486
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

Pattern Generator
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10477
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Etching System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10452
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

4 Tube Furnace
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10443
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Orion Performance Upgrade Package
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10453
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Orion Liquid Nitrogen Cooling Dewar System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
notation: E10455
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Spectrum Analyser
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: http://id.southampton.ac.uk/building/46
notation: E10392
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: EH
primary contact: primary contact

Vitesse Duo
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Vitesse Duo are diode-pumped solid-state lasers using a 10W Verdi CW laser to both seed the Vitesse ultrafast oscillator and pump the RegA. The result is a compact and economical, 2-box, all-solid-state solution for high repetition rate, ultrafast amplification.
notation: E10469
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

EVG620 Double Side Mask Aligner
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The EVG620 is a dual-use tool designed for optical double-side lithography and precision alignment up to 150 mm wafer sizes. Volume production types and manual R&D systems are available. An ultra-soft wedge compensation together with a computer controlled contact force between the mask and wafer ensures that both yield and mask lifetime are dramatically increased while production costs are lowered. The fully-automated EVG620 utilizes a cassette-to-cassette handling system to efficiently process wafers from 50 mm to 150 mm in diameter, regardless of their shape or thickness. The system safely handles thick, bowed or small diameter wafers.
notation: E10614
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

EVG150 Automated Resist Processing System
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: Designed to provide the widest range of process variations, the EVG100 series` modularity accepts spin and spray coating, developing, bake and chill modules to suit your individual production requirements. These systems accommodate the processing of an extensive range of materials such as positive and negative resists, polyimides, double-sided coating of thin resist layers, high viscosity resists, and edge protection coatings.
notation: E10615
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

CCD Sensor (S/N 01502-22-02)–Part of the FRODOSpec for the Liverpool Telescope in the Canary Islands
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: NA
description: off campus
notation: E10865
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: WF
primary contact: primary contact

3 Stacis "Quiet Island" Support Systems
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: These systems are actively-damped tables onto which senstive pieces of equipment can be mounted to isolate them from vibrational interference. These are current employed underneath the Zeiss Orion Helium Ion Microscope, the Zeiss Nvision40 Focused Ion Beam and the Zeiss EVO Scanning Electron Microscope.
notation: E10617
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Zeiss EVO Scanning Electron Microscope
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The scanning electron microscope (SEM) is used to examine microscopic topographical or compositional detail of solid specimens. The image is produced by scanning an extremely small focused beam of electrons (adjustable down to a few nm in diameter) across the surface of a specimen in an array of picture points; high-energy electron bombardment of the specimen causes signals to be emitted at each position of the beam. These are collected and their intensities are used to produce images of the specimen by modulating the brightness of equivalent pixels on a computer screen. An SEM has three distinct advantages compared to a light microscope - better resolution, greater depth of field and the ability to carry out X-ray microanalysis. The Zeiss EVO scanning electon microscope (SEM) is able to image the surfaces of a wide variety of non-conducting materials due to its variable pressure (VP) mode.
notation: E10472
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact

Nitor 301 Hot Filament Chemical Vapour Deposition (HFCVD)
related facility: Clean Rooms - Nanofabrication
contact: secondary contact
type: Equipment
within: New Mountbatten
description: The Nitor 301 Hot Filament Chemical Vapour Deposition (HFCVD), also known as Hot Wire Chemical Vapour Deposition (HWCVD), is used for deposition of intrinsic and doped amorphous and crystalline silicon films. It uses a proprietary hot filament array on a deposition area of up to 300 x 300 mm.
notation: E10758
formal organization: id.southampton.ac.uk
organization part: Physical Sciences and Engineering
organization part: School of Electronics & Computer Science
primary contact: primary contact